Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11519773 | Methods, systems, and apparatus for mass flow verification based on choked flow | Zhiyuan Ye, Justin Hough, Jaidev Rajaram, Marcel E. Josephson, Ashley M. Okada | 2022-12-06 |
| 11520358 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez +4 more | 2022-12-06 |
| 11462426 | Methods and assemblies for gas flow ratio control | Ashley M. Okada, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram, Marcel E. Josephson | 2022-10-04 |