Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476093 | Plasma etching systems and methods with secondary plasma injection | Soonam Park, Zilu Weng, Dmitry Lubomirsky | 2022-10-18 |
| 11369067 | Irrigation system and method | My T. Nguyen, Cuong Q. Hong, Luong V. Truong, Trieu T. Le, Bien T. Mai +3 more | 2022-06-28 |
| 11361941 | Methods and apparatus for processing a substrate | Junghoon Kim, Tae Seung Cho, Dmitry Lubomirsky | 2022-06-14 |
| 11264213 | Chemical control features in wafer process equipment | Qiwei Liang, Xinglong Chen, Kien N. Chuc, Dmitry Lubomirsky, Soonam Park +4 more | 2022-03-01 |