Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373845 | Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes | Saravana Kumar Natarajan, Kenneth D. Schatz, Dmitry Lubomirsky, Samartha Subramanya | 2022-06-28 |
| 11361941 | Methods and apparatus for processing a substrate | Junghoon Kim, Dmitry Lubomirsky, Toan Q. Tran | 2022-06-14 |