Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476093 | Plasma etching systems and methods with secondary plasma injection | Toan Q. Tran, Soonam Park, Dmitry Lubomirsky | 2022-10-18 |
ZW
Zilu Weng
Overall (2022): #185,552 of 548,613Top 35%
1
Patents 2022