Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11322337 | Plasma processing system workpiece carrier with thermally isolated heater plate blocks | Dmitry Lubomirsky, Anh N. Nguyen, David Palagashvili | 2022-05-03 |
| 11302520 | Chamber apparatus for chemical etching of dielectric materials | Tien Fak Tan, Dmitry Lubomirsky, Kirby H. Floyd, David Palagashvili, Alexander Tam +1 more | 2022-04-12 |
| 11257693 | Methods and systems to improve pedestal temperature control | Dmitry Lubomirsky, Chungman Kim, Kirby H. Floyd | 2022-02-22 |