Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11322337 | Plasma processing system workpiece carrier with thermally isolated heater plate blocks | Dmitry Lubomirsky, Son T. Nguyen, David Palagashvili | 2022-05-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11322337 | Plasma processing system workpiece carrier with thermally isolated heater plate blocks | Dmitry Lubomirsky, Son T. Nguyen, David Palagashvili | 2022-05-03 |