Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11322337 | Plasma processing system workpiece carrier with thermally isolated heater plate blocks | Dmitry Lubomirsky, Son T. Nguyen, Anh N. Nguyen | 2022-05-03 |
| 11302520 | Chamber apparatus for chemical etching of dielectric materials | Tien Fak Tan, Dmitry Lubomirsky, Kirby H. Floyd, Son T. Nguyen, Alexander Tam +1 more | 2022-04-12 |