Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11302520 | Chamber apparatus for chemical etching of dielectric materials | Tien Fak Tan, Dmitry Lubomirsky, Son T. Nguyen, David Palagashvili, Alexander Tam +1 more | 2022-04-12 |
| 11257693 | Methods and systems to improve pedestal temperature control | Son T. Nguyen, Dmitry Lubomirsky, Chungman Kim | 2022-02-22 |