Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469107 | Highly etch selective amorphous carbon film | Rajesh Prasad, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Harry Whitesell +4 more | 2022-10-11 |