Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473978 | Enhanced substrate temperature measurement apparatus, system and method | Dawei Sun, D. Jeffrey Lischer, Qin Chen, Dale K. Stone, Lyudmila Stone +2 more | 2022-10-18 |
RS
Ron Serisky
Overall (2022): #280,766 of 548,613Top 55%
1
Patents 2022