Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289374 | Nucleation-free gap fill ALD process | Yihong Chen, Kelvin Chan, Xinliang Lu, Srinivas Gandikota, Yong Wu +1 more | 2022-03-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289374 | Nucleation-free gap fill ALD process | Yihong Chen, Kelvin Chan, Xinliang Lu, Srinivas Gandikota, Yong Wu +1 more | 2022-03-29 |