Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D934991 | Component of a liquid discharge nozzle for semiconductor substrate processing apparatus | Kazuhiro Aiura | 2021-11-02 |
| D930796 | Liquid discharge nozzle for semiconductor substrate processing apparatus | Kazuhiro Aiura | 2021-09-14 |
| D929534 | Liquid discharge nozzle for semiconductor substrate processing apparatus | Kazuhiro Aiura | 2021-08-31 |
| 11069546 | Substrate processing system | — | 2021-07-20 |
| 11018035 | Substrate processing system | Satoshi Morita, Ryoji Ikebe, Isamu Miyamoto | 2021-05-25 |
| 11011436 | Substrate processing apparatus, control method of substrate processing apparatus and substrate processing system | Satoshi Morita, Ryoji Ikebe, Isamu Miyamoto | 2021-05-18 |