Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11018035 | Substrate processing system | Yoshifumi Amano, Satoshi Morita, Ryoji Ikebe | 2021-05-25 |
| 11011436 | Substrate processing apparatus, control method of substrate processing apparatus and substrate processing system | Yoshifumi Amano, Satoshi Morita, Ryoji Ikebe | 2021-05-18 |