Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11208725 | Substrate processing apparatus | Kouichi Mizunaga, Masami Akimoto, Katsuhiro Morikawa | 2021-12-28 |
| 11094568 | Processing apparatus, abnormality detection method, and storage medium | Kenji Nakamizo, Akinori Tanaka, Hiroshi Komiya, Mikio Nakashima, Kousuke Fukuda +3 more | 2021-08-17 |
| 11018035 | Substrate processing system | Yoshifumi Amano, Ryoji Ikebe, Isamu Miyamoto | 2021-05-25 |
| 11011436 | Substrate processing apparatus, control method of substrate processing apparatus and substrate processing system | Yoshifumi Amano, Ryoji Ikebe, Isamu Miyamoto | 2021-05-18 |
| 10936236 | Rewriting system, rewriting device and computer | Yoshihide Nakamura, Yasuyuki Shigezane, Yoshinori Ikuta, Shuuji Satake | 2021-03-02 |
| 10916396 | Load controller and load control method | Tomohiro Shiozaki, Yoshihide Nakamura, Yoshinori Ikuta, Shuuji Satake | 2021-02-09 |