Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11208725 | Substrate processing apparatus | Masami Akimoto, Satoshi Morita, Katsuhiro Morikawa | 2021-12-28 |
| 10964564 | Heating treatment apparatus and heating treatment method | Hideaki Iwasaka, Takahiro Hayashida | 2021-03-30 |