Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158525 | Substrate processing apparatus and substrate processing method | Yasuhiro Takaki, Shinichi Umeno, Takashi Nagai, Hisashi MORITA, Nobuhiro Ogata +1 more | 2021-10-26 |
| 11056335 | Substrate processing apparatus | Nobuhiro Ogata, Yusuke Hashimoto | 2021-07-06 |
| 11024518 | Substrate processing apparatus, substrate processing method and recording medium | Norihiro Ito, Nobuhiro Ogata, Takahisa Otsuka, Yuichi Douki, Yusuke Hashimoto +2 more | 2021-06-01 |