Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11135698 | Processing apparatus, processing method, and storage medium | Keigo Satake, Kenji Nakamizo | 2021-10-05 |
| 11024518 | Substrate processing apparatus, substrate processing method and recording medium | Norihiro Ito, Jiro Higashijima, Nobuhiro Ogata, Takahisa Otsuka, Yusuke Hashimoto +2 more | 2021-06-01 |