Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11180848 | Atomic layer deposition apparatus, film-forming method using atomic layer deposition apparatus, and cleaning method of atomic layer deposition apparatus | Masamitsu TORAMARU, Masaki Chiba, Masao Nakata | 2021-11-23 |
| 11127926 | Method of forming protection film for organic EL device, method of manufacturing display device and display device | Tatsuya Matsumoto, Junichi Shida, Takashi Ebisawa | 2021-09-21 |
| 11062883 | Atomic layer deposition apparatus | Masao Nakata | 2021-07-13 |
| 11024488 | Film-forming method, manufacturing method of electronic device, and plasma atomic layer deposition apparatus | Masao Nakata, Tatsuya Matsumoto, Junichi Shida | 2021-06-01 |
| 10988841 | Film-forming method, manufacturing method of electronic device, and mask holder | Masaki Chiba, Masao Nakata | 2021-04-27 |
| 10889893 | Atomic layer deposition apparatus and atomic layer deposition method | Tatsuya Matsumoto | 2021-01-12 |