Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11180848 | Atomic layer deposition apparatus, film-forming method using atomic layer deposition apparatus, and cleaning method of atomic layer deposition apparatus | Masamitsu TORAMARU, Keisuke Washio, Masao Nakata | 2021-11-23 |
| 11047627 | Cooling device | Mahiro HACHIYA, Minoru Yoshikawa | 2021-06-29 |
| 10988841 | Film-forming method, manufacturing method of electronic device, and mask holder | Keisuke Washio, Masao Nakata | 2021-04-27 |