Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211764 | Raman optical amplifier and raman optical amplification method | — | 2021-12-28 |
| 11180848 | Atomic layer deposition apparatus, film-forming method using atomic layer deposition apparatus, and cleaning method of atomic layer deposition apparatus | Masamitsu TORAMARU, Keisuke Washio, Masaki Chiba | 2021-11-23 |
| 11062883 | Atomic layer deposition apparatus | Keisuke Washio | 2021-07-13 |
| 11024488 | Film-forming method, manufacturing method of electronic device, and plasma atomic layer deposition apparatus | Keisuke Washio, Tatsuya Matsumoto, Junichi Shida | 2021-06-01 |
| 10988841 | Film-forming method, manufacturing method of electronic device, and mask holder | Keisuke Washio, Masaki Chiba | 2021-04-27 |