Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127926 | Method of forming protection film for organic EL device, method of manufacturing display device and display device | Keisuke Washio, Junichi Shida, Takashi Ebisawa | 2021-09-21 |
| 11024488 | Film-forming method, manufacturing method of electronic device, and plasma atomic layer deposition apparatus | Keisuke Washio, Masao Nakata, Junichi Shida | 2021-06-01 |
| 10889893 | Atomic layer deposition apparatus and atomic layer deposition method | Keisuke Washio | 2021-01-12 |