Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069533 | CMP system and method of use | Te-Chien Hou, Cheng-Yu Kuo, Chih-Hung Chen, William Weilun Hong, Kei-Wei Chen | 2021-07-20 |
| 10957609 | Detecting the cleanness of wafer after post-CMP cleaning | Chi-Ming Tsai, Hui-Chi Huang | 2021-03-23 |