Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145751 | Semiconductor structure with doped contact plug and method for forming the same | Kuo-Ju Chen, Su-Hao Liu, Chun-Hao Kung, Liang-Yin Chen, Huicheng Chang +6 more | 2021-10-12 |
| 11056352 | Magnetic slurry for highly efficient CMP | Yen-Ting Chen, Chun-Hao Kung, Tung-Kai Chen, Kei-Wei Chen | 2021-07-06 |
| 11043396 | Chemical mechanical polish slurry and method of manufacture | Chun-Hao Kung, Tung-Kai Chen, Chih-Chieh Chang, Kao-Feng Liao, Kei-Wei Chen | 2021-06-22 |
| 10953514 | Chemical mechanical polishing apparatus and method | Shang-Yu Wang, Chun-Hao Kung, Ching-Hsiang Tsai, Kei-Wei Chen | 2021-03-23 |
| 10957609 | Detecting the cleanness of wafer after post-CMP cleaning | Yu-Ting Yen, Chi-Ming Tsai | 2021-03-23 |
| 10947414 | Compositions for use in chemical mechanical polishing | Fang-I Chih, Chih-Chieh Chang, Kei-Wei Chen | 2021-03-16 |