Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11105928 | Light-sensing apparatus and light-sensing method thereof | Szu-Lin Cheng, Chien-Yu Chen, Shu-Lu Chen, Yun-Chung Na, Ming-Jay Yang +4 more | 2021-08-31 |
| 11086227 | Method to mitigate defect printability for ID pattern | Chia-Hao Hsu, Shinn-Sheng Yu, Chia-Chen Chen, Jeng-Horng Chen, Anthony Yen | 2021-08-10 |
| 10976655 | Extreme ultraviolet lithography system, device, and method for printing low pattern density features | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2021-04-13 |