Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211289 | Metal loss prevention using implantation | Li-Chieh Wu, Tang-Kuei Chang, Kuo-Hsiu Wei, Kei-Wei Chen, Ying-Lang Wang +5 more | 2021-12-28 |
| 10998184 | Apparatus and method for wafer cleaning | Hsin-Hsien Lu, Jung-Tsan Tsai | 2021-05-04 |