Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189515 | Method for alignment, process tool and method for wafer-level alignment | Ping-Yin Liu, Yeong-Jyh Lin, Yeur-Luen Tu | 2021-11-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189515 | Method for alignment, process tool and method for wafer-level alignment | Ping-Yin Liu, Yeong-Jyh Lin, Yeur-Luen Tu | 2021-11-30 |