Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079669 | System and method for localized EUV pellicle glue removal | Tzu-Ting Chou, Chung-Hsuan Liu, Kuan-Wen Lin, Ting-Hao Hsu, Sheng-Chi Chin | 2021-08-03 |
| 11003069 | High durability extreme ultraviolet photomask | Chia-Hao Yu, Chih-Tsung Shih, Ching-Wei Shen, Jeng-Horng Chen | 2021-05-11 |