Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079669 | System and method for localized EUV pellicle glue removal | Tzu-Ting Chou, Chung-Hsuan Liu, Chi-Lun Lu, Ting-Hao Hsu, Sheng-Chi Chin | 2021-08-03 |
KL
Kuan-Wen Lin
Overall (2021): #368,068 of 548,734Top 70%
1
Patents 2021