Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043433 | Method of inspecting surface and method of manufacturing semiconductor device | Chung-Sam Jun, Yu-Sin Yang, Yun-Jung Jee, Gil-woo Song | 2021-06-22 |
| 11004712 | Method of inspecting semiconductor wafer, inspection system for performing the same, and method of fabricating semiconductor device using the same | Joonseo Song, Souk Kim, Younghoon Sohn, Yusin Yang, Chihoon Lee | 2021-05-11 |