Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004712 | Method of inspecting semiconductor wafer, inspection system for performing the same, and method of fabricating semiconductor device using the same | Sung Yoon Ryu, Joonseo Song, Souk Kim, Younghoon Sohn, Chihoon Lee | 2021-05-11 |