Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189503 | Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system | Young-Hoo Kim, Kuntack Lee, Yong-Jhin Cho, Chawon Koh, Sunghyun Park +2 more | 2021-11-30 |
| 11087996 | Dry cleaning apparatus and dry cleaning method | Seung Min Shin, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim, Tae Hong Kim +3 more | 2021-08-10 |