Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189459 | Multibeam inspection apparatus | Hideaki Hashimoto | 2021-11-30 |
| 11101103 | Multiple electron beam inspection apparatus and multiple electron beam inspection method | Masataka Shiratsuchi, Hiromu Inoue | 2021-08-24 |
| 11004193 | Inspection method and inspection apparatus | Ryoichi Hirano, Hideo Tsuchiya, Masataka Shiratsuchi, Hideaki Hashimoto | 2021-05-11 |
| 11004657 | Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus, and multiple electron beam irradiation method | Shinji Sugihara | 2021-05-11 |
| 10984525 | Pattern inspection method and pattern inspection apparatus | Ryoichi Hirano, Hideo Tsuchiya, Masataka Shiratsuchi, Hideaki Hashimoto | 2021-04-20 |
| 10984978 | Multiple electron beam inspection apparatus and multiple electron beam inspection method | Hiromu Inoue, Ryoichi Hirano, Masataka Shiratsuchi | 2021-04-20 |