Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004193 | Inspection method and inspection apparatus | Hideo Tsuchiya, Masataka Shiratsuchi, Hideaki Hashimoto, Riki Ogawa | 2021-05-11 |
| 10997713 | Inspection device, inspection method, and storage medium | Takeshi Morino, Hideaki Okano, Yoshinori Honguh, Masataka Shiratsuchi, Hideaki Hashimoto | 2021-05-04 |
| 10984525 | Pattern inspection method and pattern inspection apparatus | Hideo Tsuchiya, Masataka Shiratsuchi, Hideaki Hashimoto, Riki Ogawa | 2021-04-20 |
| 10984978 | Multiple electron beam inspection apparatus and multiple electron beam inspection method | Hiromu Inoue, Masataka Shiratsuchi, Riki Ogawa | 2021-04-20 |