Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101103 | Multiple electron beam inspection apparatus and multiple electron beam inspection method | Masataka Shiratsuchi, Riki Ogawa | 2021-08-24 |
| 10984978 | Multiple electron beam inspection apparatus and multiple electron beam inspection method | Ryoichi Hirano, Masataka Shiratsuchi, Riki Ogawa | 2021-04-20 |