Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189459 | Multibeam inspection apparatus | Riki Ogawa | 2021-11-30 |
| 11099801 | Display system and program | Masahiro Sugumi, Airi Kurokawa, Tatsuya Nakamura, Wei Song | 2021-08-24 |
| 11004193 | Inspection method and inspection apparatus | Ryoichi Hirano, Hideo Tsuchiya, Masataka Shiratsuchi, Riki Ogawa | 2021-05-11 |
| 10997713 | Inspection device, inspection method, and storage medium | Takeshi Morino, Hideaki Okano, Yoshinori Honguh, Ryoichi Hirano, Masataka Shiratsuchi | 2021-05-04 |
| 10984525 | Pattern inspection method and pattern inspection apparatus | Ryoichi Hirano, Hideo Tsuchiya, Masataka Shiratsuchi, Riki Ogawa | 2021-04-20 |