Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11022884 | Silicon-containing resist underlayer film-forming composition having halogenated sulfonylalkyl group | Wataru SHIBAYAMA, Kenji Takase, Makoto Nakajima, Satoshi Takeda, Rikimaru Sakamoto | 2021-06-01 |
| 10995172 | Self-organized film-forming composition for use in forming a micro-phase-separated pattern | Ryuta MIZUOCHI, Yasunobu Someya, Rikimaru Sakamoto | 2021-05-04 |