Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11175583 | Silicon-containing resist underlayer film-forming composition having phenyl group-containing chromophore | Makoto Nakajima, Satoshi Takeda, Kenji Takase | 2021-11-16 |
| 11022884 | Silicon-containing resist underlayer film-forming composition having halogenated sulfonylalkyl group | Kenji Takase, Makoto Nakajima, Satoshi Takeda, Hiroyuki Wakayama, Rikimaru Sakamoto | 2021-06-01 |