Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11065654 | In situ vapor deposition polymerization to form polymers as precursors to viscoelastic fluids for particle removal from substrates | Gregory Blachut | 2021-07-20 |
| 11062897 | Metal doped carbon based hard mask removal in semiconductor fabrication | Yongsik Yu, David Cheung, Kirk Ostrowski, Nikkon Ghosh, Karthik S. Colinjivadi +2 more | 2021-07-13 |
| 11011388 | Plasma apparatus for high aspect ratio selective lateral etch using cyclic passivation and etching | Kwame Eason, Pilyeon Park, Seung Ho Park, Hsiao-Wei Chang | 2021-05-18 |