Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062897 | Metal doped carbon based hard mask removal in semiconductor fabrication | Yongsik Yu, David Cheung, Nikkon Ghosh, Karthik S. Colinjivadi, Samantha Tan +2 more | 2021-07-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062897 | Metal doped carbon based hard mask removal in semiconductor fabrication | Yongsik Yu, David Cheung, Nikkon Ghosh, Karthik S. Colinjivadi, Samantha Tan +2 more | 2021-07-13 |