PP

Pilyeon Park

Lam Research: 1 patents #103 of 349Top 30%
Overall (2021): #300,284 of 548,734Top 55%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11011388 Plasma apparatus for high aspect ratio selective lateral etch using cyclic passivation and etching Kwame Eason, Mark Kawaguchi, Seung Ho Park, Hsiao-Wei Chang 2021-05-18