Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156548 | Measurement methodology of advanced nanostructures | Manh Dang Nguyen, Phillip Atkins, Alexander Kuznetsov, Liequan Lee, Natalia Malkova +3 more | 2021-10-26 |
| 11060846 | Scatterometry based methods and systems for measurement of strain in semiconductor structures | Houssam Chouaib, Aaron Rosenberg, Kai-Hsiang Lin, Zhengquan Tan | 2021-07-13 |
| 11060982 | Multi-dimensional model of optical dispersion | Natalia Malkova, Mikhail Sushchik, Carlos L. Ygartua | 2021-07-13 |