Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204552 | Radiation-sensitive composition, pattern-forming method and radiation-sensitive acid generating agent | Tomoki Nagai, Takehiko Naruoka, Ken MARUYAMA, Motohiro SHIRATANI | 2021-12-21 |
| 11079676 | Radiation-sensitive composition, pattern-forming method, and metal-containing resin and production method thereof | Yusuke Asano, Shinya Minegishi | 2021-08-03 |