Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170483 | Sample observation device and sample observation method | Minoru Harada, Yuji Takagi, Takehiro Hirai | 2021-11-09 |
| 11087454 | Defect observation device and defect observation method | Minoru Harada, Yuji Takagi, Takehiro Hirai | 2021-08-10 |
| 10977786 | Wafer observation device | Minoru Harada, Yuji Takagi, Takehiro Hirai | 2021-04-13 |
| 10971325 | Defect observation system and defect observation method for semiconductor wafer | Minoru Harada, Yuji Takagi, Takehiro Hirai, Yohei Minekawa | 2021-04-06 |