Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177111 | Defect observation device | Akira Ito, Yohei Minekawa, Takehiro Hirai | 2021-11-16 |
| 11170483 | Sample observation device and sample observation method | Yuji Takagi, Naoaki KONDO, Takehiro Hirai | 2021-11-09 |
| 11087454 | Defect observation device and defect observation method | Naoaki KONDO, Yuji Takagi, Takehiro Hirai | 2021-08-10 |
| 10977786 | Wafer observation device | Naoaki KONDO, Yuji Takagi, Takehiro Hirai | 2021-04-13 |
| 10971325 | Defect observation system and defect observation method for semiconductor wafer | Yuji Takagi, Naoaki KONDO, Takehiro Hirai, Yohei Minekawa | 2021-04-06 |