Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177111 | Defect observation device | Akira Ito, Minoru Harada, Takehiro Hirai | 2021-11-16 |
| 10971325 | Defect observation system and defect observation method for semiconductor wafer | Minoru Harada, Yuji Takagi, Naoaki KONDO, Takehiro Hirai | 2021-04-06 |