Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107664 | Plasma processing apparatus and prediction apparatus of the condition of plasma processing apparatus | Yoshito Kamaji | 2021-08-31 |
| 11107694 | Method for releasing sample and plasma processing apparatus using same | Masaki Ishiguro, Shigeru Shirayone, Tomoyuki Tamura, Kazuyuki Ikenaga | 2021-08-31 |
| 10886110 | Plasma processing apparatus and prediction method of the condition of plasma processing apparatus | Yoshito Kamaji | 2021-01-05 |