Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107664 | Plasma processing apparatus and prediction apparatus of the condition of plasma processing apparatus | Masahiro Sumiya | 2021-08-31 |
| 10886110 | Plasma processing apparatus and prediction method of the condition of plasma processing apparatus | Masahiro Sumiya | 2021-01-05 |