SS

Shigeru Shirayone

HH Hitachi High-Technologies: 1 patents #146 of 381Top 40%
Overall (2021): #260,275 of 548,734Top 50%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11107694 Method for releasing sample and plasma processing apparatus using same Masaki Ishiguro, Masahiro Sumiya, Tomoyuki Tamura, Kazuyuki Ikenaga 2021-08-31