Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107694 | Method for releasing sample and plasma processing apparatus using same | Masaki Ishiguro, Masahiro Sumiya, Shigeru Shirayone, Tomoyuki Tamura | 2021-08-31 |
| 10886106 | Plasma processing apparatus and method for venting a processing chamber to atmosphere | Masaru Matsuzaki | 2021-01-05 |