Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10886106 | Plasma processing apparatus and method for venting a processing chamber to atmosphere | Kazuyuki Ikenaga | 2021-01-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10886106 | Plasma processing apparatus and method for venting a processing chamber to atmosphere | Kazuyuki Ikenaga | 2021-01-05 |